ABSTRACT
We report on measurements of the backscattered and secondary electron coefficients in the energy range 250eV-6 keV which are collected in UHV from target surfaces that were cleaned by ion bombardment. Data collected under conventional SEM pressures and with electron energies <2 keV exhibit an unsystematic behaviour with respect to the target atomic number. The results obtained from clean surfaces show that for electron energies > 600 eV, the backscattering coefficient increases with increased target atomic numbers. For lower electron energies, we see the influence of strong elastic scattering as a function of the target atomic number in a complex way. Secondary electron coefficients show similar behaviour to previously published data of a maximum yield at a given energy, albeit with different magnitudes and the energies they occur at.
