ABSTRACT
Three areas in which sub-nanometer resolution analytical microscopy can be advanced are identified: higher spatial resolution, better spectral resolution and exploration of new secondary signals. In each area, one example of an instrumental development is described. For higher spatial resolution the example is electron standing wave illumination. For spectral resolution it is monochromatization of the primary electron beam for 50 meV electron energy loss spectroscopy. For the exploration of new secondary signals the example is Auger spectroscopy in the scanning transmission electron microscope.
