ABSTRACT

Plan view and cross-sectional TEM, and X-Ray microanalysis in a STEM have been used to study the structural integrity of a series of strained (AlyGa1-y)xIn1-xP/GaxIn1-xP quantum well (QW) layers ranging from -1% to +2%. In the compressive strained samples relaxation in the form of island formation has been observed before the Matthews and Blakeslee critical limit is reached. At the highest tensile strain the onset of similar ‘wavy growth’ is seen.