ABSTRACT
Rutherford Backscattering Spectrometry of 2 MeV He+ ions employed in the channelling mode have been used to analyse the near-surface lattice condition of polished and Br/methanol etched n- and p-type CuInSe2 single crystals following annealing in air at temperatures from 100°C to 300°C for 1/2 hour and from 100°C to 160°C for two hours. The amount of oxygen in the near-surface layer was measured using the Ole(d,a)N17 nuclear reaction analysis of 960 keV deuterons.
