Regrowth of GaN and AlGaN on grooved stripe structure

We demonstrate regrowth of GaN and AlGaN on grooved AlGaN/GaN stripe structure for the fabrication of refractive index guided laser diode with inner stripe structure. GaN and AlGaN were grown by low pressure MOCVD and grooved structures were formed by RIE. It is shown that the grooved stripe structure is successfully buried with AlGaN as well as GaN.