ABSTRACT
Aluminum nitride is emerging as an important electronic substrate material for thermal management in advanced integrated circuits. Liquid-phase sintering is commonly used to fabricate A1N ceramics. The liquid-phase sintering of A1N with Y2O3 has been studied by controlling the secondary phase composition using the Y2O3-Al2O3 phase equilibria. Sintering of A1N was carried out over a temperature range of 1750-1950°C for 1 hour under N2 atmosphere in an A1N/BN powder bed. Full densification of the different compositions was achieved at 1900°C for one hour. The effects of temperature and composition on the sintering behavior and the secondary phase formation as well as thermal conductivity are discussed.
