ABSTRACT
In this paper, we review some recent advances in the field of scanning acoustic microscopy such as quantitative measurements and interior imaging with particular reference to microscopy of semiconducting devices. In addition, a new form of Photacoustic or Thermal Wave microscope is described which is capable of detecting current in a non-contacting fashion. The technique, which is based on an optical interferometer, has been used to study electromigration and detect faults in integrated circuits.
