ABSTRACT
X-ray diffraction (XRD) and scanning electron microscope (SEM) examination have been used to investigate the microstructural characteristics of zinc oxide thin films. The films were prepared by reactive RF magnetron sputtering on Si/SiO2 Si/SiO2/Al and stainless steel substrates. The characteristics of the ZnO film structures are discussed in relation to the deposition parameters, which should lead to effective utilisation of this material for acoustoelectronic device applications. A surface acoustic wave (SAW) resonator structure with arrays of reflecting metal strips is proposed for use as a strain sensor.
