ABSTRACT
The short-wavelength of excimers offers increased resolution both in the temporal and spatial domains, and very high focused intensities (up to 1020 W cm−2) are reached even with moderate energies.
The low saturation energy density of excimers requires large beam/amplifier cross sections; on the other hand, it ensures the use of direct amplification of subpicosecond pulses, allowing to reach very high temporal contrast. The rapidly growing Amplified Spontaneous Emission—as the sole source of noise—can effectively be removed by the novel pulse cleaning method called non-linear Fourier-filtering.
In most of the applications, the high photon energy is of great advantage. It has unique potential in plasma generation; offers pronounced absorption and higher conversion to X-rays. In micromachining, the short wavelength enhances the spatial resolution, which—together with the increased absorption—results in sharp and well-defined contours.
The unique parameters of high-brightness Krypton-Fluoride (KrF) systems make it possible to leave the conventional weak coupling regime and to enter the anomalous region of enhanced coherent coupling—characterized by the hν ≥ 5 eV, I ≥ 3 × 1015 W cm−2 pumping conditions, opening a new regime of laser–matter interaction, and the realization/development of high-brightness X-ray sources.
