ABSTRACT
This chapter describes some approaches in materials processing for various sensor technologies. Depending on the applications, a wide range of material processing techniques have been reported. Chemical vapor deposition (CVD), physical vapor deposition (PVD) techniques, electrochemical deposition (ED), and atomic layer deposition (ALD) are some methods in the thin-film processing of sensors. In other terms, screen-printing, dip-coating, and spin-coating are also chosen for various preparation of the thick film. Principles of operation and some examples from research are discussed in this chapter.
