ABSTRACT
This chapter introduces the currently available advanced semiconductor devices/process simulation tools. Technology computer-aided design (TCAD) tools are widely used in industrial environments for process modeling and predictive device simulation of the electrical characteristics of microelectronics components. This is mainly because TCAD device design and process technology can reduce cost and development time, and also secure technology choice. MINIMOS-NT is the most versatile discrete device simulator that provides users with the ability to simulate a broad range of fully-featured 2D and 3D devices. In this tool, device simulation is based on solving carrier transport equations in arbitrary semiconductor structures. Silvaco is the world’s leading software provider for TCAD, which is a branch of electronic computer-aided design aiming to model the manufacturing of semiconductor devices and their functions. Silvaco offers the virtual wafer fab, which represents several simulation tools and interactive tools allowing the design and analysis of most semiconductor devices.
