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Mechanical Design of Micromechanical Silicon Oscillating Accelerometer
DOI link for Mechanical Design of Micromechanical Silicon Oscillating Accelerometer
Mechanical Design of Micromechanical Silicon Oscillating Accelerometer
ByAnping Qiu
BookMEMS Silicon Oscillating Accelerometers and Readout Circuits
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Edition 1st Edition
First Published 2018
Imprint River Publishers
Pages 24
eBook ISBN 9781003338826
