ABSTRACT
This chapter describes a phase noise model for MEMS Silicon Oscillating Accelerometers (SOA). This model employs a unified approach to decompose the physical system of the SOA into phase and amplitude subsystems to predict the phase noise of the MEMS oscillators and the performance of the MEMS SOAs. It reveals the impacts of various noises, in both MEMS transducer and readout circuits, on the SOA performance. The soundness of this model is validated against time-domain numerical simulations. The additive noise, as its name implies, is directly added to the original signal. Multiplicative noise is considered as a noise that causes gain fluctuation. In order to obtain the frequency noise, an ideal PLL is used in SIMULINK to track the oscillation frequency dynamically. The bandwidth of the PLL is set to 2 Hz, which is high enough for observing all slopes in frequency spectrum.
