ABSTRACT
Micro-electro-mechanical accelerometers (MEMS AXLs) have seen rapid adoption as a low-cost, small size alternative to the traditional accelerometers in various applications. The Micro-ElectroMechanical Resonant Accelerometer (MEMS RXL) measures the acceleration-induced inertial force on a proof mass using micro-machined vibrating beam gauges. MEMS RXL can endure a very large input acceleration, while simultaneously enabling a high sensitivity measurement, resulting in a high dynamic range. This chapter deals with the design of high-precision MEMS RXLs for seismic acceleration measurement based on state-of-the-art micromachining technologies. The design models as well as noise floor and drift analysis of the MEMS RXL presented herein are intended to instruct the designer to make informed choices in the design of MEMS RXLs for different applications, and to help the designer evaluate, verify, and optimize the performance of MEMS RXLs. The micro-lever is a critical component to enable the increased sensitivity for the MEMS RXL.
