ABSTRACT
Focused ion beam is a versatile top-down nanofabrication method that can be used for atomic-scale material removal and applications. (FIB). Furthermore, a broad range of materials (including metals, ceramics, alloys, plastics, and so on) can be characterized. The dual-beam platform combines a high-resolution scanning electron microscope with an FIB column and includes extra tools, such as gas assisted deposition, micromanipulators, and energy dispersive spectroscopy. Because of these various purposes, the FIB is a versatile tool for the nano processing and nano fabrication industries. Micromanipulators can be used to conduct ultra-precision advanced sample preparation for transmission electron microscopy. When working with hard materials, FIB is the technique for site-specific micro- and nano structuring. Additionally, FIB sectioning and sampling techniques frequently show structural and morphological scattering of material systems with three-dimensional (3D) networks at the micro- and nano scale. This chapter primarily discusses the fundamental principles of FIB machining, with a variety of machining parameters. This chapter also discussed different ion sources that are available in the market and their associated benefits and drawbacks. There are many uses for FIB systems and same will be described with an example later in the chapter.
