ABSTRACT
Implementation of glass in microdevices such as microfluidics, micro reactors, bio-medical devices, and MEMS is increasing, due to its optical transference, chemical inertness, low thermal expansion, toughness, and ability to anode bond with silicon wafer. Electrochemical discharge machining (ECDM) is gaining importance in fabrication of such glass-based microdevices due to the absence of time-consuming activities like preparation masking and developing activities. Since the machinability of glass is low, especially at higher machining depths, researchers have proposed various approaches to overcome and improve machining performance. In this context, the present study is mainly focusing on the study of different electrolytes which include direct and hybrid electrolytes, anode and cathode configurations, tool kinematics, tool assisted with vibrations, and ultrasonic, magnetic assisted electrolytes. In addition, the technical features of the custom engineered ECDM experimental setup are also presented. Finally, the key issues open for further research are also presented. The review on machining strategies could be a source for the potential researchers for further progress in the micromachining domain using ECDM process.
