ABSTRACT

This chapter proposes a combined pixel sharpness evaluation algorithm for focus topography measurement. Experiments prove this method can effectively fill in missing points to obtain complete point cloud data. According to the principle of focusing topography recovery technology, a full set of measurement hardware equipment was built, and the measurement accuracy at 10' magnification through the accuracy verification experiment was 742.9 nm. The surface topography of the aluminum alloy arc additively manufactured parts was measured, which could observe the surface morphology and detect the defects. The experimental results show that the proposed method has both high precision and effectiveness, and the application of this method can complete the measurement and analysis of the three-dimensional surface parameters of the micro-topography.