ABSTRACT
Nanoelectromechanical system (NEMS) are emerging as a probable alternative in the field of nanotechnology. As the device feature size is of the order of few nanometers, surface effects become predominant, which impacts significantly on the NEMS performance. However, as the conventional silicon-based semiconductor material is replaced by its carbon-based counterpart, the limitations of silicon can be mitigated. Graphene, diamond, and carbon nanotubes are highly suitable and potential candidates for a NEMS device due to their high aspect ratio, Young’s modulus, thermal conductivity, and superior electron mobility. The NEMS devices offer a subthreshold swing of 2 mV/decade due to their physically movable gate, which is much better than that of its CMOS-based counterpart (higher than 60 mV/decade). Besides, a NEMS significantly reduces the off-state leakage current. Hence, the NEMSs are a potential contender in the field of electromechanical applications.
