ABSTRACT

Micro-optoelectromechanical systems (MOEMS) could be key components in the future generations of space instruments. In Earth observation, universe observation, and planet exploration, the return of the scientific instruments must be optimized in future missions. MOEMS devices are based on mature micro-electronics technology and in addition to their compactness, scalability, and specific task customization, they could generate new functions not available with current technologies. National Aeronautics and Space Administration (NASA), Japan Aerospace Exploration Agency (JAXA), European Space Agency (ESA), and Centre National d'Etudes Spatiales (CNES), that is, the US, Japanese, European, and French space agencies, have initiated several studies developing new MOEMS-based instruments.