ABSTRACT
This chapter details the types of ion sources that are available commercially, and the applications of these sources. It considers only broad-beam gridded ion sources, and gridless assist ion sources. Broad-beam gridded ion sources are in use with ion optics consisting of one, two, or three grids. The dominant factors on the shape of the ion beam from a gridded ion source are the radial uniformity of the plasma inside the ion source, the radial uniformity of the perveance of the grids, and the microdivergence of the beamlets. Ion source maintenance can be a significant factor in the downtime of a production system, especially if the downtime is unscheduled. There is a strong move towards the maintenance of ion sources by using "drop-in" replacements, so that parts can be maintained off-line. The chapter concludes with a section on ion beam neutralization.
