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Resolution Enhancement Techniques and Mask Data Preparation
DOI link for Resolution Enhancement Techniques and Mask Data Preparation
Resolution Enhancement Techniques and Mask Data Preparation book
Resolution Enhancement Techniques and Mask Data Preparation
DOI link for Resolution Enhancement Techniques and Mask Data Preparation
Resolution Enhancement Techniques and Mask Data Preparation book
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ABSTRACT
Traditionally, an IC became ready for fabrication after an IC design was converted into a physical layout, the timing veried, and the polygons certied to be DRC-clean. e data les representing the various layers were shipped to a mask shop, which used mask-writing equipment to convert each data layer into a corresponding mask, and the masks were then shipped to the fab where they were used to repeatedly manufacture the designs in silicon.