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      Chapter

      Resolution Enhancement Techniques and Mask Data Preparation
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      Chapter

      Resolution Enhancement Techniques and Mask Data Preparation

      DOI link for Resolution Enhancement Techniques and Mask Data Preparation

      Resolution Enhancement Techniques and Mask Data Preparation book

      Resolution Enhancement Techniques and Mask Data Preparation

      DOI link for Resolution Enhancement Techniques and Mask Data Preparation

      Resolution Enhancement Techniques and Mask Data Preparation book

      ByFranklin M. Schellenberg
      BookElectronic Design Automation for IC Implementation, Circuit Design, and Process Technology

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      Edition 2nd Edition
      First Published 2016
      Imprint CRC Press
      Pages 46
      eBook ISBN 9781315215112
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      ABSTRACT

      Traditionally, an IC became ready for fabrication after an IC design was converted into a physical layout, the timing veried, and the polygons certied to be DRC-clean. e data les representing the various layers were shipped to a mask shop, which used mask-writing equipment to convert each data layer into a corresponding mask, and the masks were then shipped to the fab where they were used to repeatedly manufacture the designs in silicon.

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