ABSTRACT
This chapter discusses the design and modeling of complex nano- or microelectromechanical systems (N/MEMSs) at the systems level. Such complex systems include the types of MEMS. It describes such systems with coupled differential equations and algebraic constraints. There are many benefits to using system-level, lumped analysis for the design, modeling, and simulation of N/MEMSs. In general, simulation greatly reduces the time and cost associated with the usual fabricate-and-test iterative process. However, with increasing complexity in N/MEMS design, fabricate-and-test methods become impractical. The need for simulation tools has led to the development and widespread use of computer aided engineering (CAE) tools based on distributed or finite element analysis (FEA). The chapter also discusses how to configure the models into complex N/MEMS using an efficient graphical user interface (GUI) and powerful netlist language. It summarizes the methodologies for modeling complex-engineered N/MEMS.
