ABSTRACT
Chapter 11 discussed in detail basic MEMS control and the feedback control systems that are used to improve dynamic performance of MEMS devices. This chapter focuses on two applications which take advantage of the feedback loop. The first one describes the way light intensity feedback improves the accuracy of the light output of the MEMS device. Applied this way, the light feedback allows designing a very accurate and fast variable optical attenuator-based optical waveform generator. The second example describes how the problem of lateral instability in electrostatic comb-drive actuators can be counteracted by application of the appropriate lateral feedback loop. Both examples are based on the optical switch and the variable optical attenuator, which was analyzed in details in Chapter 11.
