ABSTRACT
Thermo-optic switch is another popular optical switching technology for future optical networks. In this chapter, a new type of optical switching device structure-MEMS thermo-optic switch-is explored. It combines the strengths of both MEMS and a waveguide-based thermo-optic device, realizing a low-power, high-speed, and ultra-compact silicon-based optical switch. The new structure is able to break down the design tradeoffs existent in the traditional thermo-optic switches, and utilizes MEMS to enable tuning of the device’s working conditions. This chapter begins with a review of current thermo-optic
CONTENTS 3.1 Introduction ..........................................................................................................................90
