ABSTRACT
Microelectromechanical Systems (MEMS) are integrated circuit (IC) devices or systems that combine both electrical and mechanical components. MEMS are fabricated using typical IC batch-processing techniques with characteristic sizes ranging from nanometers to millimeters. RF MEMS are microelectromechanical systems that interact with a radio frequency (RF) signal. The integration/implementation of RF MEMS provides engineers with an additional integration option for better performance, smaller size, and lower cost in their designs.
