The fabrication and measurement of a bi-axial thermal convection acceleration sensor

There are different kinds of acceleration sensors, such as thermal accelerometer, piezoelectric accelerometer, semiconductor piezo-resistive accelerometer, electrostatic capacitance accelerometer etc. (MA Ming-jun & RAN Yingling, 2015). In general, an accelerometer sensor uses an inertial mass to detect the acceleration (GUO Wei, 2012 & LI Li-Jie, 2001). Considering the fragility and complexity, a thermal convection chamber can be used instead of the inertial mass to overcome the disadvantages of the usual mechanical accelerometer (LI Li-Jie, 2001; WAN, Cai-xin, 2012; Stephen B. Pope, 2000; Alan J. Chapman, 1987 & S.M. Sze, 1985).