ABSTRACT
Along with rapid developments in MEMS technology, the performance of the MEMS gyroscope has improved constantly. The electrical model is an important component of the interface circuit design of the gyroscope, and the electrical model in consideration of non-ideal factors of the sensor chip is the necessary guarantee for achieving a high performance of the interface circuit (Walther and Desloges 2013, Mahyar, Maysam and Hassan 2013, Aaltonen, Speeti and Saukoski 2011). Mainly focused on the non-ideal factors of the micromachined gyroscope, the electrical model of the micromachined gyroscope structure is modified in this paper, which includes multiple non-ideal factors in the structure effectively. Firstly, the offset error and nonlinearity of the micro-gyroscope chip are analysed here; secondly, the current electrical models are analysed and modified models containing four non-ideal factors are presented based on the original models; finally, a simulation verification of the new electrical models was performed with HSPICE, and the simulation results are analysed.
