ABSTRACT
The preceding miniaturization in microelectronics connected with
the application of optical signals for information transfer demands
silicon-based optical devices. Almost all the various photonic
devices integrated on silicon wafer, such as silicon-based optical
waveguides, splitters, couplers, modulators, photonic crystals, and
detectors, have already been demonstrated. These advances are
based on well-developed silicon technology such as lithography,
selective etching, and silicon oxidation. This chapter describes
another approach of engineering different silicon-based optical
devices. It is based on in-depth and in-plane nanostructuring of
silicon wafers.
