ABSTRACT
Modern radiation therapy requires measurement of dose in challenging scenarios. Semiconductor dosimeters have attractive properties and can be fabricated in a range of geometries to suit specific purposes. In this chapter, the physics, operational characteristics, and clinical use of three main semiconductor dosimeters are discussed. The first section describes silicon diode dosimeters, highly suited to small-field dosimetry and array arrangements; the second section describes silicon metal-oxide-semiconductor field-effect transistor (MOSFET) dosimeters and their applications in in vivo and surface dosimetry; finally, the third section describes natural and synthetic diamond dosimeters and their emerging role in small-field and relative dosimetry.
