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Chapter

Reactive ion-assisted deposition of variable index ZrOxFv

Chapter

Reactive ion-assisted deposition of variable index ZrOxFv

DOI link for Reactive ion-assisted deposition of variable index ZrOxFv

Reactive ion-assisted deposition of variable index ZrOxFv

Edited ByA Glocker David

BookHandbook of Thin Film Process Technology

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Edition 1st Edition

First Published 1998

Imprint CRC Press

eBook ISBN 9781351072793

ABSTRACT

Contributed by U J Gibson, K D Cornett and M Jonsson

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