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Chapter

Ion-beam sputtering of TiO2

Chapter

Ion-beam sputtering of TiO2

DOI link for Ion-beam sputtering of TiO2

Ion-beam sputtering of TiO2

Edited ByA Glocker David

BookHandbook of Thin Film Process Technology

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Edition 1st Edition

First Published 1998

Imprint CRC Press

eBook ISBN 9781351072793

ABSTRACT

Contributed by D Siegfried, B Buchholtz and T Barker

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