ABSTRACT
The UK SuperSTEM project has the intention to make aberration corrected scanning transmission microscopy (STEM) available to the scientific community of the UK, as well as the international community. The UK SuperSTEM project was initiated originally by Prof. L M Brown of the University of Cambridge at the EMAG conference in 1997. The aberration corrected STEM of the UK SuperSTEM facility provides outstanding lateral resolution at 100 keV beam energy. Further improvements of the electrical, mechanical and thermal stability are being or will be undertaken in near future so that a further improvement may be expected. The structure of an interface between nickel-disilicide and silicon is experimentally verified for the first time using annular dark field (ADF) imaging. The monotonic dependence of the ADF signal is demonstrated and the shape in three dimensions of a nickel-disilicide inclusion is indicated. The chapter describes the instrument capabilities and demonstrates that the imaging performance of the instrument with several examples.
