ABSTRACT
This chapter describes a new analytical technique for scanning electron microscopes (SEM). It aims to develop an interface that allows the collection of Raman, photoluminescence, and cathodoluminescence spectra, whilst observing a secondary electron image and collecting energy dispersive spectra. The design and capabilities of the new analytical technique are compared and contrasted with those of conventional in-SEM methods, and with optical Raman spectroscopy. The recent development of SEMs that can operate at higher pressures or with field emission electron guns has extended their suitability to a wider range of samples and applications. Most SEMs are routinely fitted with energy dispersive spectroscopy equipment and, whilst this has proven a very valuable technique, it yields only elemental analysis: sample chemistry is only accessible by deduction. SEM observation using a low-vacuum-SEM and backscattered electron imaging shows clearly the structure of the laminate, and the interface with the mounting medium.
