ABSTRACT
Monte Carlo program for simulation of electron trajectories is being improved by adding an X-ray generation calculation for each electron trajectory step. The method uses the three-dimensional (3D) energy deposition matrix and an additional equivalent matrix of average electron energies. These two matrixes provide all information about electron energy deposition in the specimen and carried out generalized shell ionization computations and to obtain the 3D distribution of K shell ionization. Simulation results include the number of Ka photons per steradian per electron flying out from a spot of electron beam incidence in a specified direction, and information about the depth generation. The simulation can be used for individual elements with different tilt angles and with electron energies up to 500 keV, and for multi-layered specimens. The chapter presents the physical, mathematical and computing models used in the calculation, describes results obtained, and compares both experimental data and those from other simulation programs.
