ABSTRACT
This chapter presents the characteristics of the new microscope and some results on elemental imaging of boron, carbon and nitrogen-containing nanotubes and Ab0 9N 12 ceramic crystals to demonstrate the feasibility of the high-spatial-resolution elemental images. A 300 kV energy-filtered transmission electron microscope equipped with an Omega-type energy filter has been developed for observation of high-spatial-resolution elemental images using inelastic electrons. The accelerating voltage dependence of the inelastic images is calculated to confirm that the spatial resolution for the elemental images is improved with an increase in the voltage from 120 kV to 300 kV. Elemental mapping using inelastic electrons in a transmtsston electron microscope is a powerful tool for investigation of atom distributions in local regions of thin specimens. There are two types of commercial energy-filtering transmission electron microscopes: an in-column type where the energy filters are located within the microscope column at 100 kV or 200 kV accelerating voltages; and a post-column type.
