ABSTRACT
Potential applications are investigations of strain relaxation of mismatched heterostructures and quantitative comparisons with diffuse X-ray scattering experiments. The technique will be demonstrated for 60° misfit dislocations in a low-mismatched SiGe/Si(OO I) heterostructure. Partially strain relaxed heterostructures containing misfit dislocation arrays can be analysed by diffuse X-ray scattering techniques which, for data evaluation, generally employ correlation functions to describe the spatial distribution of the misfit dislocations. The conventional Burgers vector analysis based on the simple gb=O invisibility criterion fails for the important case of 60° misfit dislocations due to the presence of residual transmission electron microscopy (TEM) image contrast. The chapter summarizes a novel method which exploits the splitting and displacement of bend contours at crossings with the dislocations in conventional bright-field or dark-field images in plan-view TEM samples for the analysis of the Burgers vectors of interfacial 60° misfit dislocations.
