ABSTRACT
This chapter aims to provide some general, practical guidelines to aid in the selection of the optimum fly’s eye homogenizer, as applied to Excimer lasers and their applications. It discusses the beam entering the homogenizer section that has usually been through some type of preconditioning. The chapter reviews Excimer laser beam delivery techniques and examines actual industrial case histories of ultraviolet Excimer laser processing and the optics required to effectively use these lasers in cost-effective manufacturing situations. It shows that the illumination section of the beam delivery system has a powerful effect on the imaging system, by controlling image ray directionality. The illumination section of an Excimer laser system is central to its performance, harnessing the full potential of this powerful production tool’s strengths and capacity. An Excimer laser’s optical system can be subdivided into three main sections: the light source or laser, the illumination system, and the imaging section.
