ABSTRACT
The advent of microelectromechanical systems (MEMS) technology is important in the development and use of chemical sensor technology for a range of applications, especially those that include operation in harsh environments or that affect safety. As will be discussed in this chapter, chemical microsensors can provide unique information that can significantly improve safety and reliability while decreasing costs of a system or process. Such information can also be used to improve a system’s performance and reduce its effect on the environment. Chemical sensor data also can complement that derived from physical 11-2measurements such as temperature, pressure, heat flux, etc., further improving overall knowledge of a system and expanding its capabilities.
