ABSTRACT

EFAB™ technology [Cohen, 1999] is a unique micromanufacturing process based on multilayer electrodeposition of materials that is capable of producing complex, truly three-dimensional microscale components, devices, and systems, from prototypes through volume production. Figures 6.1 through 6.5 show some typical devices produced using EFAB technology. The technology was invented at the University of Southern California and licensed to Microfabrica Inc. (formerly MEMGen Corporation), a venture-funded company founded in 1999 and located in the ′Los Angeles, California area′.