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Chapter
Chapter
of PECVD ShNis deposited at 300°C to suppress current slump, sometimes called
DOI link for of PECVD ShNis deposited at 300°C to suppress current slump, sometimes called
of PECVD ShNis deposited at 300°C to suppress current slump, sometimes called
of various widths, are laid out with gate-
Edition 1st Edition
First Published 2003
Imprint CRC Press
Pages 2
eBook ISBN 9780429076596
ABSTRACT
228