ABSTRACT

Higher output lamps are requested in order to save production cost and time. Some techniques are embraced to improve their output, such as supplying more power and supplying faster rising voltage and so on. The output increases in proportion to input power at less power, however saturates and what is worse, decreases at higher power. The main reason of output saturation is considered as bulb transmissivity decrease and excimer density decrease due to high temperature. Therefore high output xenon excimer lamp systems are always equipped with cooling devices. Some lamps are embedded in cooling outer bracket and some coaxial lamps are cooled by gas flow inside the inner tube. These methods are effective to cool the bulb directly, however indirect cooling of excimer gas in the discharge area.