ABSTRACT
Two major factors distinguish the existence, effectiveness, and development o f micro-scale transducers from that o f conventional-scale ones. The first is the physics o f scaling and the second is the suitability o f manufacturing techniques and processes. The former is governed by the laws o f physics and thus a funda mental factor, while the latter is related to the development o f manufacturing tech nology, which is a significant, though not fundamental, factor. Due to the combi nation o f these factors, effective micro-scale transducers can often not be con structed as geometrically scaled-down versions o f conventional-scale transducers.
