ABSTRACT
The advantages of scanning microscopy include the following: the possibility of direct analysis of a fresh fracture of samples; high accuracy in mapping a surface of the test substance; the ability to observe the surface topography; a large depth of focus (about 300 times bigger than in an optical microscope); a high voltage contrast; and the possibility of observing adjacent areas of the sample, at a magnification of 100 to 500 times, and at a resolution less than 10 nm (Elssner et al. 1999). The result of a sample analysis is an image with a material surface and with marked points which can be analyzed, and a map.
