ABSTRACT
Applications for nonchemical processes cover the entire spectrum from gross cleaning of paint or grime to delicate processing of semiconductor wafers and precision optics. Applications to clean objects
What Is “Nonchemical” Cleaning? .............................................................373 Why Is “Nonchemical” Cleaning Utilized? ...............................................373 Categories of Nonchemical Processes .......................................................374 Dry Media • Non-Dry Media • Dry Chemical Cleaning • Cleaning with Light Limitations of Nonchemical Cleaning .......................................................375 Summary of “Nonchemical” Chapters in Handbook for Critical Cleaning .........................................................................................................375 Other Nonchemical Approaches • Laser • Atmospheric Plasma • UV/Ozone • Fluidized Dry Media Summary .......................................................................................................379 References ......................................................................................................379
