ABSTRACT
This chapter introduces a micromanipulation system for the visually monitored assembly of components on the micrometer to nanometer scale, as established through the development of three-dimensional (3D) photonic crystals. The term "micromanipulation" is coined from "micro", which roughly indicates the scale length of target objects that are "manipulated" or handled. The micromanipulation system comprises remotely operated multiaxial stages installed in the specimen chamber of a scanning electron microscope (SEM). Photonic crystals are often described as "semiconductors of light" because they can control the behavior of light. This capability originates from their fine structure, which has a length scale that is comparable to the wavelength of the target light. Unit components were prepared in the form of air-bridge plates using conventional semiconductor processing techniques for easy removal from a wafer during micromanipulation, and assembled into the designed 3D structure using a micromanipulation system.
