ABSTRACT

We intend to open up a new eld called microstructure plastic arts using FIB-CVD. To demonstrate the possibilities of this eld, a “microwine glass” was

created on a Si substrate and a human hair as a work of microstructure plastic arts as shown in Figures 4.2a and 4.3, respectively. A microwine glass with an external diameter of 2.75 µm and a height of 12 µm was formed. e fabrication time was 600 s at a beam current of 16 pA. is beautiful microwine glass shows the potential of the eld of microstructure plastic art. A micro-Colosseum and a micro-Leaning Tower of Pisa were also fabricated on a Si substrate as shown in Figures 4.2c and 4.4, respectively.