ABSTRACT

Later, in the year 1978, Seliger and his collaborators at the Hughes Research Laboratories were the rst to employ this emitter for direct patterning; the rst-ever scanning ion microscope was realized by coupling an LMIS to charged particle optics (Seliger et  al. 1979). e era of FIB development had begun. In the early 1980s, many FIB systems were developed and tested with dierent results, which we will recall and analyze in the following paragraphs. For further details of the early history, see Prewett and Mair (1991), Orlo et al. (2003), Giannuzzi and Stevie (2005), and Utlaut (2009), and for an analysis of the physics of the LMIS, see Forbes and Mair (2009).