ABSTRACT
A growing number of commercial applications and disruptive technologies focus on MEMS devices. This includes inertia sensors, gyroscopes, pressure sensors, microtransducers, RF varactor diodes, filters, switches and so on. The MEMS field is not new by any means — it has a history of more than 40 years. However, most of these years it was in early phases of research and development of ideas and conceptual
prototype devices. It is only recently we started to witness significant advances and a shift to commercialization of several applications. To a large extent, this transition is due to significant progress in understanding and improving reliability of MEMS devices.
