ABSTRACT
ABSTRACT: Impedance spectroscopy is widely used in material characterization and characterization of energy storage devices. In material analysis the specific properties of macro scale samples are in focus of investigation. However, the characteristic properties obtained with bulk measurements can differ from those measured at thin films. In the field of energy storage devices impedance spectroscopy is used to find parameter sets for modeling the individual storage behavior. Here the dimension of the device are of little interest. The combination of material as well as storage behavior characterization can be used in the case of chip level energy storage devices. For this, test structures are measured over a wide frequency range and analyzed via model based approach. With this process dielectric, resistive and electrochemical effects can be separated and analyzed in a quantitative way. The procedure was tested on nanometer range thin films of the solid state electrolyte LiPON based capacitors. Precise measurement of the energy storage material characteristics can support further optimization of the storage material and production processes.
