Raman scattering study is one of the most powerful nondestructive technique to characterize the structural analysis, phase formation, and precipitations of other phases. Early theoretical studies by T. Dietl et al. predicted that the transition metal (TM)-doped p-type Zinc Oxide (ZnO) might display Curie temperatures above room temperature. In fact, room temperature ferromagnetism has been reported for TM-doped ZnO system, although the materials were n-type. However, there exist controversies whether the observed ferromagnetism is intrinsic property of the DMS thin films or it arises from the clustering or impurities. The high-Tc ferromagnetism in TM-doped ZnO thin films are a controversial issue; this is often due either to magnetic contamination or magnetic secondary-phase formation. The x-ray absorption near edge structure characterization of a series of pulsed laser deposition-grown Cu-doped ZnO thin films were carried out by Ma et al. The Photoluminescence spectra change significantly when Cu is doped in ZnO thin films.